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Happiness
is a Warm Evaporator!
Although
on the Dichro page I said that these machines are called "vacuum
vapor deposition systems", nobody actually calls them that.
Like a family pet, we have other endearing terms for these guys such as
"evaporators", or just simply "coaters". Below
are a few pictures of our beloved coater. I won't explain all of the
details but if you are technically inclined you may enjoy these
pictures. Click on any picture to view a larger version.
This
is the front of the vacuum chamber. The unit stands about 7 feet
tall. The vacuum chamber itself is approximately 32 inches
across. Below the chamber is the pumping stack. The little red
thing on the left below the table top says "danger high
voltage". This translates to "sudden death" for
you non-technical types. I guess I should put the side panels back on!

This
is the front of the system again with the front door open. Here you
can see some of the fun stuff inside. Item #1 is a "dome"
that holds the glass. There are three of them in the system.
Each dome rotates and also the whole assembly revolves. This is
called a "double rotation planetary" system. Item #2 are
the heaters. These are used to heat the glass to ~300° C.
Item #3 is a mask to block some of the coating from hitting the glass (for
uniformity). Item #4 is the shutter. This opens to allow the
coating to leave the source and subsequently deposit on the glass.
Item #5 is the electron beam gun. More on this later...

Here
is a top view of the electron beam gun. The actual electron beam
comes up thru the square hole. There are powerful electromagnets
that curve the beam around so that it hits whatever you want to
evaporate. You can see some of the stuff that we evaporate in the
center of the picture. This particular type of beam gun has 4
pockets to hold the stuff. The pockets rotate under the top of the
assembly so that only one pocket is visible at a time. Looks like I
should clean this thing one of these days.

We
are now looking at the electron beam gun head on. The two braided
copper wires coming up from the bottom are the high voltage connections to
the "emitter". The emitter actually emits the electrons
for the electron beam. The four wires on the top of the gun are for
the electromagnets that direct and focus the beam. Think of the
emitter as a 14,000 watt light bulb operating at 8,000 volts that emits
all of its energy in a thin beam approximately 2mm wide and 10mm
long. This isn't exactly right, but it sounds good.

Here
the electron beam is actually heating up some stuff and evaporating
it. This is a horrible picture but it is really hard to get a good
picture thru the tiny peep hole in the front of the machine. There
is a filter in front of the camera. Without this filter it is like
looking directly into the sun. That reminds me... Why do we use an
electron beam? Because you have to get this stuff to somewhere
around 3000° C. before it will evaporate. Believe it or not, using
an electron beam is the easiest way to do this.

This
is the control rack for the machine. Lots of pretty lights.
Included here are vacuum gauges, valve/pump controllers, electron beam gun
controllers, gas flow controllers, deposition monitor, etc. You
can't see it but there is a gigantic electron beam power supply to the
left of this rack. Maybe someday I'll take a picture of it.

Here
is another really horrible picture. These are pumps that create the
vacuum. The black thing is a mechanical pump to create a rough
vacuum (~200 mTorr). If you know what you are looking for you can
almost see the diffusion pump that creates the high vacuum. The
curved beige corrugated tube that you see on the left side of the picture
is attached to a wet/dry shop vac. I'm still trying to figure out
how to incorporate this into the system :-).

And
finally here are some completed pieces of glass fresh out of the
coater. These happen to be Uroboros fibroid sheets destined to be Chinese character ornaments or maybe Moon
Fronds.
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